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Ryuichi NAKAGAWA
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Toyama, JP
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Patents Grants
last 30 patents
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Patent Grant
Vaporizer, substrate processing apparatus, and method of manufactur...
Patent number
11,866,822
Issue date
Jan 9, 2024
Kokusai Electric Corporation
Hirohisa Yamazaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device, non-transitory comput...
Patent number
11,299,804
Issue date
Apr 12, 2022
Kokusai Electric Corporation
Yuji Takebayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
VAPORIZER, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTUR...
Publication number
20210079523
Publication date
Mar 18, 2021
Kokusai Electric Corporation
Hirohisa YAMAZAKI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Method of Manufacturing Semiconductor Device, Non-transitory Comput...
Publication number
20200095676
Publication date
Mar 26, 2020
Kokusai Electric Corporation
Yuji TAKEBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...