Ryuichi Sato

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Surface shape measurement apparatus
- Patent number 8,514,407
- Issue date Aug 20, 2013
- Canon Kabushiki Kaisha
- Ryuichi Sato
- G01 - MEASURING TESTING
Information Patent Grant
Surface shape measurement apparatus
- Patent number 8,462,353
- Issue date Jun 11, 2013
- Canon Kabushiki Kaisha
- Ryuichi Sato
- G01 - MEASURING TESTING
Information Patent Grant
Surface shape measurement apparatus
- Patent number 8,411,280
- Issue date Apr 2, 2013
- Canon Kabushiki Kaisha
- Ryuichi Sato
- G01 - MEASURING TESTING
Information Patent Grant
Wavefront splitting element for EUV light and phase measuring appar...
- Patent number 6,982,796
- Issue date Jan 3, 2006
- Canon Kabushiki Kaisha
- Ryuichi Sato
- G01 - MEASURING TESTING
Information Patent Grant
Projection exposure apparatus having aberration measurement device
- Patent number 6,859,264
- Issue date Feb 22, 2005
- Canon Kabushiki Kaisha
- Akihiro Nakauchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wavefront aberration measurement method and projection exposure app...
- Patent number 6,650,398
- Issue date Nov 18, 2003
- Canon Kabushi Kaisha
- Akihiro Nakauchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure and method which tests optical characteristics of optical...
- Patent number 5,774,205
- Issue date Jun 30, 1998
- Canon Kabushiki Kaisha
- Ryuichi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control system for a fine pattern printing apparatus
- Patent number 5,197,118
- Issue date Mar 23, 1993
- Canon Kabushiki Kaisha
- Ryuichi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT APPARATUS AND METHOD
- Publication number 20120010850
- Publication date Jan 12, 2012
- Canon Kabushiki Kaisha
- Akihiro NAKAUCHI
- G01 - MEASURING TESTING
Information Patent Application
SURFACE SHAPE MEASUREMENT APPARATUS
- Publication number 20110080592
- Publication date Apr 7, 2011
- Canon Kabushiki Kaisha
- Ryuichi Sato
- G01 - MEASURING TESTING
Information Patent Application
SURFACE SHAPE MEASUREMENT APPARATUS
- Publication number 20110080595
- Publication date Apr 7, 2011
- Canon Kabushiki Kaisha
- Ryuichi Sato
- G01 - MEASURING TESTING
Information Patent Application
SURFACE SHAPE MEASUREMENT APPARATUS
- Publication number 20110080593
- Publication date Apr 7, 2011
- Canon Kabushiki Kaisha
- Ryuichi Sato
- G01 - MEASURING TESTING
Information Patent Application
IMAGE FORMING SYSTEM AND PAPER SHEET OUTPUT METHOD
- Publication number 20100244359
- Publication date Sep 30, 2010
- Ryuichi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Wavefront splitting element for EUV light and phase measuring appar...
- Publication number 20060039067
- Publication date Feb 23, 2006
- Ryuichi Sato
- G01 - MEASURING TESTING
Information Patent Application
Wavefront splitting element for EUV light and phase measuring appar...
- Publication number 20030142322
- Publication date Jul 31, 2003
- Ryuichi Sato
- G01 - MEASURING TESTING
Information Patent Application
Wavefront aberration measurement method and projection exposure app...
- Publication number 20020122162
- Publication date Sep 5, 2002
- Akihiro Nakauchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus having aberration measurement device
- Publication number 20020024643
- Publication date Feb 28, 2002
- Akihiro Nakauchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Ryuichi Sato

Person

Patents Grantslast 30 patents

Surface shape measurement apparatus

Surface shape measurement apparatus

Surface shape measurement apparatus

Wavefront splitting element for EUV light and phase measuring appar...

Projection exposure apparatus having aberration measurement device

Wavefront aberration measurement method and projection exposure app...

Exposure and method which tests optical characteristics of optical...

Control system for a fine pattern printing apparatus

Patents Applicationslast 30 patents

MEASUREMENT APPARATUS AND METHOD

SURFACE SHAPE MEASUREMENT APPARATUS

SURFACE SHAPE MEASUREMENT APPARATUS

SURFACE SHAPE MEASUREMENT APPARATUS

IMAGE FORMING SYSTEM AND PAPER SHEET OUTPUT METHOD

Wavefront splitting element for EUV light and phase measuring appar...

Wavefront splitting element for EUV light and phase measuring appar...

Wavefront aberration measurement method and projection exposure app...

Projection exposure apparatus having aberration measurement device