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Ryuichi TAKASHIMA

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 12,051,570
    • Issue date Jul 30, 2024
    • Tokyo Electron Limited
    • Maju Tomura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 10,410,877
    • Issue date Sep 10, 2019
    • Tokyo Electron Limited
    • Ryuichi Takashima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method and plasma processing apparatus
    • Patent number 9,922,806
    • Issue date Mar 20, 2018
    • Tokyo Electron Limited
    • Maju Tomura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method and etching apparatus
    • Patent number 9,659,789
    • Issue date May 23, 2017
    • Tokyo Electron Limited
    • Ryohei Takeda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 8,906,808
    • Issue date Dec 9, 2014
    • Tokyo Electron Limited
    • Ryuichi Takashima
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20210272780
    • Publication date Sep 2, 2021
    • TOKYO ELECTRON LIMITED
    • Maju TOMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20180174805
    • Publication date Jun 21, 2018
    • TOKYO ELECTRON LIMITED
    • Maju TOMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20170178922
    • Publication date Jun 22, 2017
    • TOKYO ELECTRON LIMITED
    • Ryuichi TAKASHIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20160379856
    • Publication date Dec 29, 2016
    • TOKYO ELECTRON LIMITED
    • Maju TOMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND ETCHING APPARATUS
    • Publication number 20160189975
    • Publication date Jun 30, 2016
    • TOKYO ELECTRON LIMITED
    • Ryohei TAKEDA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
    • Publication number 20140162463
    • Publication date Jun 12, 2014
    • TOKYO ELECTRON LIMITED
    • Ryuichi TAKASHIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20140011363
    • Publication date Jan 9, 2014
    • TOKYO ELECTRON LIMITED
    • Ryuichi TAKASHIMA
    • H01 - BASIC ELECTRIC ELEMENTS