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Ryuichi Takebuchi
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Yamanashi, JP
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last 30 patents
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Patent Grant
Probe apparatus and method of alignment for the same
Patent number
5,321,352
Issue date
Jun 14, 1994
Tokyo Electron Yamanashi Limited
Ryuichi Takebuchi
G01 - MEASURING TESTING
Information
Patent Grant
Method of inspecting electric characteristics of wafers and apparat...
Patent number
5,124,931
Issue date
Jun 23, 1992
Tokyo Electron Limited
Masaaki Iwamatsu
G01 - MEASURING TESTING
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Patent Grant
Method of positioning objects to be measured
Patent number
4,966,520
Issue date
Oct 30, 1990
Tokyo Electron Limited
Keiichi Yokota
G01 - MEASURING TESTING