Ryuichi YUI

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 11,456,160
- Issue date Sep 27, 2022
- Tokyo Electron Limited
- Naohiko Okunishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustment method for filter unit and plasma processing apparatus
- Patent number 11,328,908
- Issue date May 10, 2022
- Tokyo Electron Limited
- Nozomu Nagashima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ADJUSTMENT METHOD FOR FILTER UNIT AND PLASMA PROCESSING APPARATUS
- Publication number 20200126772
- Publication date Apr 23, 2020
- TOKYO ELECTRON LIMITED
- Nozomu NAGASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190295819
- Publication date Sep 26, 2019
- TOKYO ELECTRON LIMITED
- Naohiko OKUNISHI
- H01 - BASIC ELECTRIC ELEMENTS