Ryuichiro Mitani

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of semiconductor manufacturing apparatus and non-transitory...
- Patent number 10,890,899
- Issue date Jan 12, 2021
- Ebara Corporation
- Ryuichiro Mitani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Processing end point detection method, polishing method, and polish...
- Patent number 10,207,390
- Issue date Feb 19, 2019
- TOSHIBA MEMORY CORPORATION
- Noburu Shimizu
- B24 - GRINDING POLISHING
Information Patent Grant
Processing end point detection method, polishing method, and polish...
- Patent number 8,554,356
- Issue date Oct 8, 2013
- Ebara Corporation
- Noburu Shimizu
- B24 - GRINDING POLISHING
Information Patent Grant
Polished state monitoring apparatus and polishing apparatus using t...
- Patent number 7,300,332
- Issue date Nov 27, 2007
- Ebara Corporation
- Yoichi Kobayashi
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
DESIGN METHOD OF SEMICONDUCTOR MANUFACTURING APPARATUS AND NON-TRAN...
- Publication number 20190171193
- Publication date Jun 6, 2019
- EBARA CORPORATION
- Ryuichiro MITANI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESSING END POINT DETECTION METHOD, POLISHING METHOD, AND POLISH...
- Publication number 20140004773
- Publication date Jan 2, 2014
- Kabushiki Kaisha Toshiba
- Noburu SHIMIZU
- G01 - MEASURING TESTING
Information Patent Application
REMOTE MONITORING SYSTEM FOR POLISHING END POINT DETECTION UNITS
- Publication number 20130268106
- Publication date Oct 10, 2013
- Ryuichiro MITANI
- B24 - GRINDING POLISHING
Information Patent Application
Processing end point detection method, polishing method,and polishi...
- Publication number 20100015889
- Publication date Jan 21, 2010
- Noburu Shimizu
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and apparatus for measuring a polishing condition
- Publication number 20060274326
- Publication date Dec 7, 2006
- Yoichi Kobayashi
- B24 - GRINDING POLISHING