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Ryuji Asai
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Kumamoto, JP
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Patents Grants
last 30 patents
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Patent Grant
Abnormality determination system and abnormality determination meth...
Patent number
8,812,266
Issue date
Aug 19, 2014
Tokyo Electron Limited
Naoto Nakamura
G05 - CONTROLLING REGULATING
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Patent Grant
Method of measuring a heating plate temperature, substrate processi...
Patent number
7,655,886
Issue date
Feb 2, 2010
Tokyo Electron Limited
Hiroshi Tomita
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ABNORMALITY DETERMINATION SYSTEM AND ABNORMALITY DETERMINATION METH...
Publication number
20130304419
Publication date
Nov 14, 2013
TOKYO ELECTRON LIMITED
Naoto Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Measuring a Heating Plate Temperature, Substrate Processi...
Publication number
20080142500
Publication date
Jun 19, 2008
Hiroshi Tomita
H01 - BASIC ELECTRIC ELEMENTS