Ryuji Kusajima

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Iwate, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heat treatment apparatus, heat treatment method, and film forming m...
- Patent number 11,784,070
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,674,224
- Issue date Jun 13, 2023
- Tokyo Electron Limited
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and film deposition method
- Patent number 11,581,201
- Issue date Feb 14, 2023
- Tokyo Electron Limited
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20200340111
- Publication date Oct 29, 2020
- TOKYO ELECTRON LIMITED
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND FILM FORMING M...
- Publication number 20200340116
- Publication date Oct 29, 2020
- TOKYO ELECTRON LIMITED
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20200303222
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...