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Ryuji TAMURA
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Handa-City, JP
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Patents Grants
last 30 patents
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Patent Grant
Member for semiconductor manufacturing apparatus
Patent number
11,996,313
Issue date
May 28, 2024
NGK Insulators, Ltd.
Ryuji Tamura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
WAFER PLACEMENT TABLE
Publication number
20240162016
Publication date
May 16, 2024
NGK Insulators, Ltd.
Ryuji TAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ADJUSTING HEAT UNIFORMITY ON WAFER MOUNT AND METHOD OF MA...
Publication number
20240120216
Publication date
Apr 11, 2024
NGK Insulators, Ltd.
Hiroya SUGIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMBER FOR SEMICONDUTOR MANUFACTURING APPARATUS
Publication number
20220108909
Publication date
Apr 7, 2022
NGK Insulators, Ltd.
Ryuji TAMURA
H01 - BASIC ELECTRIC ELEMENTS