Ryukichi Shimizu

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Nirasaki-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming a pattern and substrate processing system
- Patent number 9,279,184
- Issue date Mar 8, 2016
- Tokyo Electron Limited
- Kazuhiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Contact processing using multi-input/multi-output (MIMO) models
- Patent number 8,532,796
- Issue date Sep 10, 2013
- Tokyo Electron Limited
- Daniel J Prager
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device fabricating method, plasma processing system a...
- Patent number 8,263,498
- Issue date Sep 11, 2012
- Tokyo Electron Limited
- Ryukichi Shimizu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING A PATTERN AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20150167163
- Publication date Jun 18, 2015
- TOKYO ELECTRON LIMITED
- Kazuhiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Contact Processing Using Multi-Input/Multi-Output (MIMO) Models
- Publication number 20120253497
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Daniel J. Prager
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device fabricating method, plasma processing system a...
- Publication number 20080020585
- Publication date Jan 24, 2008
- Ryukichi Shimizu
- H01 - BASIC ELECTRIC ELEMENTS