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Ryuma IWASHITA
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Gunma, JP
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last 30 patents
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Patent Grant
Device, manufacturing method, and exposure apparatus
Patent number
10,573,491
Issue date
Feb 25, 2020
Advantest Corporation
Akio Yamada
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
DEVICE, MANUFACTURING METHOD, AND EXPOSURE APPARATUS
Publication number
20160314930
Publication date
Oct 27, 2016
Advantest Corporation
Akio YAMADA
H01 - BASIC ELECTRIC ELEMENTS