Ryusei KASHIMURA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,664,263
- Issue date May 30, 2023
- Tokyo Electron Limited
- Yusuke Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement method and measuring jig
- Patent number 11,456,199
- Issue date Sep 27, 2022
- Tokyo Electron Limited
- Ryusei Kashimura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Measuring device, measurement method, and plasma processing device
- Patent number 10,720,313
- Issue date Jul 21, 2020
- Tokyo Electron Limited
- Masanori Sato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ALUMINA CERAMIC MEMBER, METHOD FOR MANUFACTURING ALUMINA CERAMIC ME...
- Publication number 20240429031
- Publication date Dec 26, 2024
- TOKYO ELECTRON LIMITED
- Masanori SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220059385
- Publication date Feb 24, 2022
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASUREMENT METHOD AND MEASURING JIG
- Publication number 20200211886
- Publication date Jul 2, 2020
- TOKYO ELECTRON LIMITED
- Ryusei KASHIMURA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MEASURING DEVICE, MEASUREMENT METHOD, AND PLASMA PROCESSING DEVICE
- Publication number 20190066982
- Publication date Feb 28, 2019
- TOKYO ELECTRON LIMITED
- Masanori SATO
- H01 - BASIC ELECTRIC ELEMENTS