Ryuta Higuchi

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Control system, control method, recording medium storing control pr...
- Patent number 11,948,782
- Issue date Apr 2, 2024
- Tokyo Electron Limited
- Ryuta Higuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and measurement circuit
- Patent number 10,903,049
- Issue date Jan 26, 2021
- Tokyo Electron Limited
- Ryuta Higuchi
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS, RF SYSTEM, AND RF CONTROL METHOD
- Publication number 20250191883
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Ryuta HIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL SYSTEM, CONTROL METHOD, RECORDING MEDIUM STORING CONTROL PR...
- Publication number 20210159059
- Publication date May 27, 2021
- TOKYO ELECTRON LIMITED
- Ryuta HIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND MEASUREMENT CIRCUIT
- Publication number 20190108979
- Publication date Apr 11, 2019
- TOKYO ELECTRON LIMITED
- Ryuta Higuchi
- H03 - BASIC ELECTRONIC CIRCUITRY