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Ryuto OZASA
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Kumamoto, JP
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Patents Grants
last 30 patents
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Patent Grant
Dressing apparatus and dressing method for substrate rear surface p...
Patent number
11,059,145
Issue date
Jul 13, 2021
Tokyo Electron Limited
Yoshiki Okamoto
B24 - GRINDING POLISHING
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Patent Grant
Substrate processing apparatus, substrate processing method and sto...
Patent number
10,840,079
Issue date
Nov 17, 2020
Tokyo Electron Limited
Yasushi Takiguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE P...
Publication number
20210308828
Publication date
Oct 7, 2021
TOKYO ELECTRON LIMITED
Yoshiki Okamoto
B24 - GRINDING POLISHING
Information
Patent Application
DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE P...
Publication number
20190047118
Publication date
Feb 14, 2019
TOKYO ELECTRON LIMITED
Yoshiki Okamoto
B24 - GRINDING POLISHING
Information
Patent Application
Substrate Processing Apparatus, Substrate Processing Method and Sto...
Publication number
20180151343
Publication date
May 31, 2018
TOKYO ELECTRON LIMITED
Yasushi TAKIGUCHI
H01 - BASIC ELECTRIC ELEMENTS