Ryuuji Hayahara

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck device
- Patent number 11,348,819
- Issue date May 31, 2022
- Sumitomo Osaka Cement Co., Ltd.
- Yuuki Kinpara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck device
- Patent number 11,201,076
- Issue date Dec 14, 2021
- Sumitomo Osaka Cement Co., Ltd.
- Ryuuji Hayahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plate-shaped body for temperature measurement and temperature measu...
- Patent number 10,502,639
- Issue date Dec 10, 2019
- Sumitomo Osaka Cement Co., Ltd.
- Mamoru Kosakai
- G01 - MEASURING TESTING
Information Patent Grant
Electrostatic chuck apparatus
- Patent number 9,721,822
- Issue date Aug 1, 2017
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck apparatus
- Patent number 9,343,346
- Issue date May 17, 2016
- Sumitomo Osaka Cement Co., Ltd.
- Mamoru Kosakai
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electrostatic chuck device
- Patent number 9,209,061
- Issue date Dec 8, 2015
- Sumitomo Osaka Cement Co., Ltd.
- Ryuuji Hayahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck apparatus
- Patent number 8,981,263
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK DEVICE
- Publication number 20200395235
- Publication date Dec 17, 2020
- Sumitomo Osaka Cement Co., Ltd.
- Ryuuji HAYAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK APPARATUS
- Publication number 20150179492
- Publication date Jun 25, 2015
- TOKYO ELECTRON LIMITED
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK DEVICE
- Publication number 20140301010
- Publication date Oct 9, 2014
- Sumitomo Osaka Cement Co., Ltd.
- Ryuuji Hayahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATE-SHAPED BODY FOR TEMPERATURE MEASUREMENT AND TEMPERATURE MEASU...
- Publication number 20140204975
- Publication date Jul 24, 2014
- Sumitomo Osaka Cement Co., Ltd.
- Mamoru Kosakai
- G01 - MEASURING TESTING
Information Patent Application
ELECTROSTATIC CHUCK APPARATUS
- Publication number 20120299253
- Publication date Nov 29, 2012
- SUMITOMO OSAKA CEMENT CO., LTD.
- Mamoru Kosakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK APPARATUS
- Publication number 20120281334
- Publication date Nov 8, 2012
- SUMITOMO OSAKA CEMENT CO., LTD.
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS