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Ryuzo Houchin
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Hirakata, JP
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last 30 patents
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Patent Grant
Apparatus and method for forming thin film
Patent number
5,863,338
Issue date
Jan 26, 1999
Matsushita Electric Industrial Co., Ltd.
Yuichiro Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for forming thin film
Patent number
5,501,739
Issue date
Mar 26, 1996
Matsushita Electric Industrial Co., Ltd.
Yuichiro Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...