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Ryuzou HOUCHIN
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Osaka, JP
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last 30 patents
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Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
8,591,754
Issue date
Nov 26, 2013
Panasonic Corporation
Shogo Okita
F27 - FURNACES KILNS OVENS RETORTS
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Patent Grant
Wafer reclamation method and wafer reclamation apparatus
Patent number
8,563,332
Issue date
Oct 22, 2013
Panasonic Corporation
Shogo Okita
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
8,231,798
Issue date
Jul 31, 2012
Panasonic Corporation
Shogo Okita
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
7,736,528
Issue date
Jun 15, 2010
Panasonic Corporation
Shogo Okita
F27 - FURNACES KILNS OVENS RETORTS
Patents Applications
last 30 patents
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Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20140048527
Publication date
Feb 20, 2014
PANASONIC CORPORATION
Shogo OKITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20120256363
Publication date
Oct 11, 2012
Shogo Okita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER RECLAMATION METHOD AND WAFER RECLAMATION APPARATUS
Publication number
20100173431
Publication date
Jul 8, 2010
PANASONIC CORPORATION
Shogo Okita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20100051584
Publication date
Mar 4, 2010
Shogo Okita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND TRAY
Publication number
20090255901
Publication date
Oct 15, 2009
Shogo Okita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20090218045
Publication date
Sep 3, 2009
Mitsuru Hiroshima
H01 - BASIC ELECTRIC ELEMENTS