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S. V. Babu
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Potsdam, NY, US
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last 30 patents
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Patent Application
Slurry and method for chemical-mechanical planarization of copper
Publication number
20050026444
Publication date
Feb 3, 2005
S. V. Babu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Polishing slurry and method for chemical-mechanical polishing of co...
Publication number
20050022456
Publication date
Feb 3, 2005
S. V. Babu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...