Saangrut Sangplung

Person

Sherwood, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Low volume showerhead with porous baffle
- Patent number 10,741,365
- Issue date Aug 11, 2020
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low volume showerhead with faceplate holes for improved flow unifor...
- Patent number 10,378,107
- Issue date Aug 13, 2019
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods enabling low defect processing via controlled s...
- Patent number 10,323,323
- Issue date Jun 18, 2019
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Valve manifold deadleg elimination via reentrant flow path
- Patent number 9,920,844
- Issue date Mar 20, 2018
- Lam Research Corporation
- Karl Leeser
- B08 - CLEANING
Information Patent Grant
Systems and methods for reducing backside deposition and mitigating...
- Patent number 9,852,901
- Issue date Dec 26, 2017
- Lam Research Corporation
- Sesha Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods enabling low defect processing via controlled s...
- Patent number 9,631,276
- Issue date Apr 25, 2017
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for reducing backside deposition and mitigating...
- Patent number 9,460,915
- Issue date Oct 4, 2016
- Lam Research Corporation
- Sesha Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS ENABLING LOW DEFECT PROCESSING VIA CONTROLLED S...
- Publication number 20170175269
- Publication date Jun 22, 2017
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL DEPOSITION CHAMBER HAVING GAS SEAL
- Publication number 20170101710
- Publication date Apr 13, 2017
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS ENABLING LOW DEFECT PROCESSING VIA CONTROLLED S...
- Publication number 20170016115
- Publication date Jan 19, 2017
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATING...
- Publication number 20160372318
- Publication date Dec 22, 2016
- LAM RESEARCH CORPORATION
- Sesha Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW VOLUME SHOWERHEAD WITH FACEPLATE HOLES FOR IMPROVED FLOW UNIFOR...
- Publication number 20160340782
- Publication date Nov 24, 2016
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VALVE MANIFOLD DEADLEG ELIMINATION VIA REENTRANT FLOW PATH
- Publication number 20160147234
- Publication date May 26, 2016
- LAM RESEARCH CORPORATION
- Karl Leeser
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATING...
- Publication number 20160079057
- Publication date Mar 17, 2016
- LAM RESEARCH CORPORATION
- Sesha Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW VOLUME SHOWERHEAD WITH POROUS BAFFLE
- Publication number 20150315706
- Publication date Nov 5, 2015
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL DEPOSITION CHAMBER HAVING GAS SEAL
- Publication number 20150004798
- Publication date Jan 1, 2015
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS

Saangrut Sangplung

Person

Patents Grantslast 30 patents

Low volume showerhead with porous baffle

Low volume showerhead with faceplate holes for improved flow unifor...

Systems and methods enabling low defect processing via controlled s...

Valve manifold deadleg elimination via reentrant flow path

Systems and methods for reducing backside deposition and mitigating...

Systems and methods enabling low defect processing via controlled s...

Systems and methods for reducing backside deposition and mitigating...

Patents Applicationslast 30 patents

SYSTEMS AND METHODS ENABLING LOW DEFECT PROCESSING VIA CONTROLLED S...

CHEMICAL DEPOSITION CHAMBER HAVING GAS SEAL

SYSTEMS AND METHODS ENABLING LOW DEFECT PROCESSING VIA CONTROLLED S...

SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATING...

LOW VOLUME SHOWERHEAD WITH FACEPLATE HOLES FOR IMPROVED FLOW UNIFOR...

VALVE MANIFOLD DEADLEG ELIMINATION VIA REENTRANT FLOW PATH

SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATING...

LOW VOLUME SHOWERHEAD WITH POROUS BAFFLE

CHEMICAL DEPOSITION CHAMBER HAVING GAS SEAL