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Sabarinath JAYASEELAN
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Niskayuna, NY, US
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last 30 patents
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Patent Grant
Inline buried metal void detection by surface plasmon resonance (SPR)
Patent number
9,588,044
Issue date
Mar 7, 2017
GLOBALFOUNDRIES Inc.
Sabarinath Jayaseelan
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
INLINE BURIED METAL VOID DETECTION BY SURFACE PLASMON RESONANCE (SPR)
Publication number
20170016822
Publication date
Jan 19, 2017
GLOBALFOUNDRIES INC.
Sabarinath JAYASEELAN
G01 - MEASURING TESTING