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Saburo Kamiya
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Yokohama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Interferometric position-measuring devices and methods
Patent number
7,876,452
Issue date
Jan 25, 2011
Nikon Corporation
Michael R. Sogard
G01 - MEASURING TESTING
Information
Patent Grant
Exposure apparatus and production method of device using the same
Patent number
7,471,372
Issue date
Dec 30, 2008
Nikon Corporation
Saburo Kamiya
G01 - MEASURING TESTING
Information
Patent Grant
System and method for measuring displacement of a stage
Patent number
7,283,200
Issue date
Oct 16, 2007
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stage device and exposure apparatus
Patent number
6,897,963
Issue date
May 24, 2005
Nikon Corporation
Tetsuo Taniguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, device manufacturing method and environmental c...
Patent number
6,784,972
Issue date
Aug 31, 2004
Nikon Corporation
Yoshitomo Nagahashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device production method in which position o...
Patent number
6,741,358
Issue date
May 25, 2004
Nikon Corporation
Saburo Kamiya
G01 - MEASURING TESTING
Information
Patent Grant
Exposure apparatus
Patent number
6,714,278
Issue date
Mar 30, 2004
Nikon Corporation
Saburo Kamiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus
Patent number
6,710,854
Issue date
Mar 23, 2004
Nikon Corporation
Naomasa Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus
Patent number
6,377,336
Issue date
Apr 23, 2002
Nikon Corporation
Naomasa Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods to control the environment and exposure apparatus
Patent number
6,002,987
Issue date
Dec 14, 1999
Nikon Corporation
Saburo Kamiya
F24 - HEATING RANGES VENTILATING
Information
Patent Grant
Method and apparatus for correcting linearity errors of a moving mi...
Patent number
5,790,253
Issue date
Aug 4, 1998
Nikon Corporation
Saburo Kamiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus
Patent number
5,719,704
Issue date
Feb 17, 1998
Nikon Corporation
Naomasa Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate holder
Patent number
5,563,683
Issue date
Oct 8, 1996
Nikon Corporation
Saburo Kamiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical measuring apparatus having a partitioning wall for dividing...
Patent number
5,550,633
Issue date
Aug 27, 1996
Nikon Corporation
Saburo Kamiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Dual interferometer measuring system including a wavelength correct...
Patent number
5,392,120
Issue date
Feb 21, 1995
Nikon Corporation
Saburo Kamiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus
Patent number
5,272,501
Issue date
Dec 21, 1993
Nikon Corporation
Kenji Nishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of and apparatus for measuring coordinate position and posit...
Patent number
5,151,749
Issue date
Sep 29, 1992
Nikon Corporation
Akikazu Tanimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser beam transmitting apparatus
Patent number
5,018,848
Issue date
May 28, 1991
Nikon Corporation
Saburo Kamiya
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Projection exposure apparatus
Patent number
4,989,031
Issue date
Jan 29, 1991
Nikon Corporation
Saburo Kamiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device for detecting the levelling of the surface of an object
Patent number
4,902,900
Issue date
Feb 20, 1990
Nikon Corporation
Saburo Kamiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus
Patent number
4,853,745
Issue date
Aug 1, 1989
Nikon Corporation
Saburo Kamiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser beam working system
Patent number
4,820,899
Issue date
Apr 11, 1989
Nikon Corporation
Ikuo Hikima
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Exposure method, exposure apparatus and device manufacturing method
Publication number
20100033694
Publication date
Feb 11, 2010
Nikon Corporation
Saburo Kamiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INTERFEROMETRIC POSITION-MEASURING DEVICES AND METHODS
Publication number
20080291464
Publication date
Nov 27, 2008
NIKON CORPORATION
Michael R. Sogard
G01 - MEASURING TESTING
Information
Patent Application
System and method for measuring displacement of a stage
Publication number
20050012918
Publication date
Jan 20, 2005
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus and production method of device using the same
Publication number
20040165166
Publication date
Aug 26, 2004
Nikon Corporation
Saburo Kamiya
G01 - MEASURING TESTING
Information
Patent Application
Exposure apparatus and exposure method
Publication number
20040156026
Publication date
Aug 12, 2004
Nikon Corporation
Saburo Kamiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, device manufacturing method and environmental c...
Publication number
20020050572
Publication date
May 2, 2002
Nikon Corporation
Yoshitomo Nagahashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection exposure apparatus
Publication number
20020048008
Publication date
Apr 25, 2002
Naomasa Shiraishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus
Publication number
20010050759
Publication date
Dec 13, 2001
Nikon Corporation
Saburo Kamiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY