Sachie ISHIBASHI

Person

  • Miyagi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus

    • Patent number 9,425,028
    • Issue date Aug 23, 2016
    • Tokyo Electron Limited
    • Yusei Kuwabara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20140116620
    • Publication date May 1, 2014
    • TOKYO ELECTRON LIMITED
    • Yusei KUWABARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...