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Sachie ISHIBASHI
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Miyagi, JP
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last 30 patents
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Patent Grant
Plasma processing apparatus
Patent number
9,425,028
Issue date
Aug 23, 2016
Tokyo Electron Limited
Yusei Kuwabara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20140116620
Publication date
May 1, 2014
TOKYO ELECTRON LIMITED
Yusei KUWABARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...