TREA

Sachiko Furuya

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  • Tokyo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Etching process
    • Patent number 5,770,098
    • Issue date Jun 23, 1998
    • Tokyo Electron Kabushiki Kaisha
    • Yoichi Araki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of etching a substrate
    • Patent number 5,721,090
    • Issue date Feb 24, 1998
    • Tokyo Electron Limited
    • Shin Okamoto
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY