Sachio Uto

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Defect inspection method and its device
- Patent number 9,976,966
- Issue date May 22, 2018
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and its device
- Patent number 9,513,228
- Issue date Dec 6, 2016
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus
- Patent number 9,151,719
- Issue date Oct 6, 2015
- Hitachi High-Technologies Corporation
- Koichi Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for reviewing defects
- Patent number 8,975,582
- Issue date Mar 10, 2015
- Hitachi High-Technologies Corporation
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting defect in object surface
- Patent number 8,760,643
- Issue date Jun 24, 2014
- Hitachi High-Technologies Corporation
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Method for inspecting pattern defect and device for realizing the same
- Patent number 8,748,795
- Issue date Jun 10, 2014
- Hitachi High-Technologies Corporation
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Grant
Method and equipment for detecting pattern defect
- Patent number 8,553,214
- Issue date Oct 8, 2013
- Hitachi, Ltd.
- Hiroaki Shishido
- G01 - MEASURING TESTING
Information Patent Grant
Defects inspecting apparatus and defects inspecting method
- Patent number 8,508,727
- Issue date Aug 13, 2013
- Hitachi High-Technologies Corporation
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting defect on object surface
- Patent number 8,482,728
- Issue date Jul 9, 2013
- Hitachi High-Technologies Corporation
- Sachio Uto
- B08 - CLEANING
Information Patent Grant
Pattern defect inspection apparatus and method
- Patent number 8,467,048
- Issue date Jun 18, 2013
- Hitachi High-Technologies Corporation
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detecting defects
- Patent number 8,462,330
- Issue date Jun 11, 2013
- Hitachi High-Technologies Corporation
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting pattern
- Patent number 8,451,439
- Issue date May 28, 2013
- Hitachi, Ltd.
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 8,289,507
- Issue date Oct 16, 2012
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus
- Patent number 8,269,959
- Issue date Sep 18, 2012
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Pattern defect inspection apparatus and method
- Patent number 8,233,145
- Issue date Jul 31, 2012
- Hitachi High-Technologies Corporation
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Grant
Defects inspecting apparatus and defects inspecting method
- Patent number 8,228,495
- Issue date Jul 24, 2012
- Hitachi High-Technologies Corporation
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting defects
- Patent number 8,218,138
- Issue date Jul 10, 2012
- Hitachi High-Technologies Corporation
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting pattern
- Patent number 8,149,395
- Issue date Apr 3, 2012
- Hitachi, Ltd.
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detecting defects
- Patent number 8,107,065
- Issue date Jan 31, 2012
- Hitachi High-Technologies Corporation
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus
- Patent number 8,094,295
- Issue date Jan 10, 2012
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for reviewing defects
- Patent number 8,093,557
- Issue date Jan 10, 2012
- Hitachi High-Technologies Corporation
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Grant
Defects inspecting apparatus and defects inspecting method
- Patent number 8,013,989
- Issue date Sep 6, 2011
- Hitachi High-Technologies Corporation
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting defects
- Patent number 7,973,920
- Issue date Jul 5, 2011
- Hitachi High-Technologies Corporation
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 7,952,700
- Issue date May 31, 2011
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting pattern
- Patent number 7,911,601
- Issue date Mar 22, 2011
- Hitachi, Ltd.
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Method for inspecting defect and apparatus for inspecting defect
- Patent number 7,903,244
- Issue date Mar 8, 2011
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and system
- Patent number 7,859,656
- Issue date Dec 28, 2010
- Hitachi High-Technologies Corporation
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for reviewing defects
- Patent number 7,851,753
- Issue date Dec 14, 2010
- Hitachi High-Technologies Corporation
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Method of manufacturing display device
- Patent number 7,834,353
- Issue date Nov 16, 2010
- Hitachi Displays, Ltd.
- Mikio Hongo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 7,817,261
- Issue date Oct 19, 2010
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DEFECT INSPECTION METHOD AND ITS DEVICE
- Publication number 20170102338
- Publication date Apr 13, 2017
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND ITS DEVICE
- Publication number 20150022806
- Publication date Jan 22, 2015
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20140333923
- Publication date Nov 13, 2014
- Hitachi High-Technologies Corporation
- Koichi Taniguchi
- G02 - OPTICS
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING DEFECT IN OBJECT SURFACE
- Publication number 20130269126
- Publication date Oct 17, 2013
- Sachio UTO
- B08 - CLEANING
Information Patent Application
PATTERN DEFECT INSPECTION APPARATUS AND METHOD
- Publication number 20120268734
- Publication date Oct 25, 2012
- Hitachi High-Technologies Corporation
- Hidetoshi NISHIYAMA
- G01 - MEASURING TESTING
Information Patent Application
DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD
- Publication number 20120262709
- Publication date Oct 18, 2012
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR DETECTING DEFECTS
- Publication number 20120194809
- Publication date Aug 2, 2012
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING PATTERN
- Publication number 20120176602
- Publication date Jul 12, 2012
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
- Publication number 20120133929
- Publication date May 31, 2012
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR REVIEWING DEFECTS
- Publication number 20120074319
- Publication date Mar 29, 2012
- Hidetoshi Nishiyama
- G02 - OPTICS
Information Patent Application
DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD
- Publication number 20110310382
- Publication date Dec 22, 2011
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Apparatus and Method for Inspecting Defects
- Publication number 20110255074
- Publication date Oct 20, 2011
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN
- Publication number 20110228258
- Publication date Sep 22, 2011
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
PATTERN DEFECT INSPECTING APPARATUS AND METHOD
- Publication number 20110221886
- Publication date Sep 15, 2011
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING PATTERN
- Publication number 20110170092
- Publication date Jul 14, 2011
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING AN OBJECT SURFACE DEFECT
- Publication number 20110141272
- Publication date Jun 16, 2011
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
Defect Inspection Method and System
- Publication number 20110075134
- Publication date Mar 31, 2011
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING DEFECTS
- Publication number 20110063603
- Publication date Mar 17, 2011
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN
- Publication number 20110032515
- Publication date Feb 10, 2011
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
Method And Equipment For Detecting Pattern Defect
- Publication number 20110001972
- Publication date Jan 6, 2011
- Hiroaki Shishido
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR DETECTING DEFECTS
- Publication number 20100271628
- Publication date Oct 28, 2010
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING DEFECTS
- Publication number 20100265496
- Publication date Oct 21, 2010
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Application
DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD
- Publication number 20100259751
- Publication date Oct 14, 2010
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN DEFECT INSPECTION APPARATUS AND METHOD
- Publication number 20100225903
- Publication date Sep 9, 2010
- Hitachi High-Technologies Corporation
- Hidetoshi NISHIYAMA
- G01 - MEASURING TESTING
Information Patent Application
Method And Apparatus For Reviewing Defects
- Publication number 20100019150
- Publication date Jan 28, 2010
- Hidetoshi Nishiyama
- G02 - OPTICS
Information Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
- Publication number 20100002227
- Publication date Jan 7, 2010
- Akira HAMAMATSU
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR INSPECTING DEFECT AND APPARATUS FOR INSPECTING DEFECT
- Publication number 20090323054
- Publication date Dec 31, 2009
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETECTING DEFECTS
- Publication number 20090213366
- Publication date Aug 27, 2009
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Application
Defect Inspection Method And System
- Publication number 20090141269
- Publication date Jun 4, 2009
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
Apparatus And Method For Inspecting Defects
- Publication number 20090122303
- Publication date May 14, 2009
- Hiroyuki Nakano
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Defect inspection method and its device

Defect inspection method and its device

Inspection apparatus

Method and apparatus for reviewing defects

Apparatus and method for inspecting defect in object surface

Method for inspecting pattern defect and device for realizing the same

Method and equipment for detecting pattern defect

Defects inspecting apparatus and defects inspecting method

Apparatus and method for inspecting defect on object surface

Pattern defect inspection apparatus and method

Method and apparatus for detecting defects

Apparatus and method for inspecting pattern

Method of apparatus for detecting particles on a specimen

Inspection method and inspection apparatus

Pattern defect inspection apparatus and method

Defects inspecting apparatus and defects inspecting method

Apparatus and method for inspecting defects

Apparatus and method for inspecting pattern

Method and apparatus for detecting defects

Inspection method and inspection apparatus

Method and apparatus for reviewing defects

Defects inspecting apparatus and defects inspecting method

Apparatus and method for inspecting defects

Method of apparatus for detecting particles on a specimen

Apparatus and method for inspecting pattern

Method for inspecting defect and apparatus for inspecting defect

Defect inspection method and system

Method and apparatus for reviewing defects

Method of manufacturing display device

Method of apparatus for detecting particles on a specimen

Patents Applicationslast 30 patents

DEFECT INSPECTION METHOD AND ITS DEVICE

DEFECT INSPECTION METHOD AND ITS DEVICE

INSPECTION APPARATUS

APPARATUS AND METHOD FOR INSPECTING DEFECT IN OBJECT SURFACE

PATTERN DEFECT INSPECTION APPARATUS AND METHOD

DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD

METHOD AND APPARATUS FOR DETECTING DEFECTS

APPARATUS AND METHOD FOR INSPECTING PATTERN

INSPECTION METHOD AND INSPECTION APPARATUS

METHOD AND APPARATUS FOR REVIEWING DEFECTS

DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD

Apparatus and Method for Inspecting Defects

METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN

PATTERN DEFECT INSPECTING APPARATUS AND METHOD

APPARATUS AND METHOD FOR INSPECTING PATTERN

APPARATUS AND METHOD FOR INSPECTING AN OBJECT SURFACE DEFECT

Defect Inspection Method and System

APPARATUS AND METHOD FOR INSPECTING DEFECTS

METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN

Method And Equipment For Detecting Pattern Defect

METHOD AND APPARATUS FOR DETECTING DEFECTS

APPARATUS AND METHOD FOR INSPECTING DEFECTS

DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD

PATTERN DEFECT INSPECTION APPARATUS AND METHOD

Method And Apparatus For Reviewing Defects

INSPECTION METHOD AND INSPECTION APPARATUS

METHOD FOR INSPECTING DEFECT AND APPARATUS FOR INSPECTING DEFECT

METHOD AND APPARATUS FOR DETECTING DEFECTS

Defect Inspection Method And System

Apparatus And Method For Inspecting Defects