Sadamichi Mori

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and operation method of substrate pr...
- Patent number 11,043,399
- Issue date Jun 22, 2021
- Tokyo Electron Limited
- Tomiyasu Maezono
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING LIQUID SUPPLY SYSTEM AND OPERATION METHOD THEREOF
- Publication number 20240234169
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Masatoshi KASAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING LIQUID SUPPLY SYSTEM AND OPERATION METHOD THEREOF
- Publication number 20240136204
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Masatoshi KASAHARA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND OPERATION METHOD OF SUBSTRATE PR...
- Publication number 20200211867
- Publication date Jul 2, 2020
- TOKYO ELECTRON LIMITED
- Tomiyasu Maezono
- B08 - CLEANING