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Sadanand V. Desphande
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Fishkill, NY, US
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last 30 patents
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Patent Grant
Hard mask integrated etch process for patterning of silicon oxide a...
Patent number
6,869,542
Issue date
Mar 22, 2005
International Business Machines Corporation
Sadanand V. Desphande
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
HARD MASK INTEGRATED ETCH PROCESS FOR PATTERNING OF SILICON OXIDE A...
Publication number
20040178169
Publication date
Sep 16, 2004
International Business Machines Corporation
Sadanand V. Desphande
H01 - BASIC ELECTRIC ELEMENTS