Sadayasu SUYAMA

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Kyoto-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning method and substrate cleaning device
- Patent number 9,028,621
- Issue date May 12, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING DEVICE
- Publication number 20120006361
- Publication date Jan 12, 2012
- Tadashi MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS