TREA

Sagar Deepak KHIVSARA

Follow

Person

  • Hsinchu, TW
People

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    LITHOGRAPHY THERMAL CONTROL
    • Publication number 20240389215
    • Publication date Nov 21, 2024
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tai-Yu CHEN
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Acoustic Particle Deflection In Lithography Tool
    • Publication number 20230384696
    • Publication date Nov 30, 2023
    • Taiwan Semiconductor Manufacturing company Ltd.
    • Tai-Yu Chen
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SYSTEM AND METHOD FOR PERFORMING EXTREME ULTRAVIOLET PHOTOLITHOGRAP...
    • Publication number 20230367225
    • Publication date Nov 16, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tai-Yu CHEN
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    ACOUSTIC PARTICLE DEFLECTION IN LITHOGRAPHY TOOL
    • Publication number 20230333491
    • Publication date Oct 19, 2023
    • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
    • Tai-Yu Chen
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    LITHOGRAPHY THERMAL CONTROL
    • Publication number 20230284366
    • Publication date Sep 7, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tai-Yu CHEN
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    LITHOGRAPHY THERMAL CONTROL
    • Publication number 20230065403
    • Publication date Mar 2, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tai-Yu CHEN
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SYSTEM AND METHOD FOR PERFORMING EXTREME ULTRAVIOLET PHOTOLITHOGRAP...
    • Publication number 20220350257
    • Publication date Nov 3, 2022
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tai-Yu CHEN
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SYSTEM AND METHOD FOR PERFORMING EXTREME ULTRAVIOLET PHOTOLITHOGRAP...
    • Publication number 20210349396
    • Publication date Nov 11, 2021
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tai-Yu CHEN
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY