Sai Hung Lam

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for calibrating lithography process
- Patent number 9,293,354
- Issue date Mar 22, 2016
- Semiconductor Manufacturing International (Shanghai) Corporation
- Chun Chi Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus to prevent contamination of optical element by...
- Patent number 7,701,549
- Issue date Apr 20, 2010
- Semiconductor Manufacturing International (Shanghai) Corporation
- Chin Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR CALIBRATING LITHOGRAPHY PROCESS
- Publication number 20110279797
- Publication date Nov 17, 2011
- Semiconductor Manufacturing International (Shanghai) Corporation
- CHUN CHI CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus to prevent contamination of optical element by...
- Publication number 20080106708
- Publication date May 8, 2008
- Semiconductor Manufacturing International (Shanghai) Corporation
- Chin Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY