TREA

Sakae Nakatsuka

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  • Yamanashi-ken, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method for forming metallic tungsten film
    • Patent number 6,964,790
    • Issue date Nov 15, 2005
    • Tokyo Electron Limited
    • Masayuki Nasu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of manufacturing a processing apparatus
    • Patent number 6,625,862
    • Issue date Sep 30, 2003
    • Hitachi Ltd.
    • Morio Kajiyama
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 6,599,367
    • Issue date Jul 29, 2003
    • Tokyo Electron Limited
    • Sakae Nakatsuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and apparatus for forming a film on an object to be processed
    • Patent number 6,454,909
    • Issue date Sep 24, 2002
    • Tokyo Electron Limited
    • Kimihiro Matsuse
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Shower head
    • Patent number 6,036,782
    • Issue date Mar 14, 2000
    • Tokyo Electron Limited
    • Sumi Tanaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents