Sakae Sugimoto

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Sendai, JP

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Patents Grantslast 30 patents

Information Patent Grant
Material for semiconductor holder in electron beam writing apparatus
- Patent number 4,442,067
- Issue date Apr 10, 1984
- Tohoku Tokushuko Kabushiki Kaisha
- Yoshinobu Saito
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...