Saket Chadda

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for electrochemical planarization of a workpiece
- Patent number 8,268,135
- Issue date Sep 18, 2012
- Novellus Systems, Inc.
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Orbiting indexable belt polishing station for chemical mechanical p...
- Patent number 7,229,343
- Issue date Jun 12, 2007
- SpeedFam-IPEC Corporation
- Saket Chadda
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for electrochemically depositing a material onto a workpi...
- Patent number 7,033,464
- Issue date Apr 25, 2006
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for the electrochemical deposition and removal...
- Patent number 7,025,860
- Issue date Apr 11, 2006
- Novellus Systems, Inc.
- Saket Chadda
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for electrochemical planarization of a workpiece
- Patent number 6,974,525
- Issue date Dec 13, 2005
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and process for polishing a workpiece
- Patent number 6,849,547
- Issue date Feb 1, 2005
- SpeedFam-IPEC Corporation
- Saket Chadda
- B24 - GRINDING POLISHING
Information Patent Grant
Orbiting indexable belt polishing station for chemical mechanical p...
- Patent number 6,793,565
- Issue date Sep 21, 2004
- SpeedFam-IPEC Corporation
- Saket Chadda
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for electrochemical planarization of a workpiece
- Patent number 6,736,952
- Issue date May 18, 2004
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for electrochemically depositing a material on...
- Patent number 6,572,755
- Issue date Jun 3, 2003
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for electrochemical planarization of a workpiece
- Patent number 6,464,855
- Issue date Oct 15, 2002
- SpeedFam-IPEC Corporation
- Saket Chadda
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Method for polishing copper on a workpiece surface
- Publication number 20060255016
- Publication date Nov 16, 2006
- Novellus Systems, Inc.
- Julia Svirchevski
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE
- Publication number 20060081460
- Publication date Apr 20, 2006
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ORBITING INDEXABLE BELT POLISHING STATION FOR CHEMICAL MECHANICAL P...
- Publication number 20050009452
- Publication date Jan 13, 2005
- SpeedFam-IPEC Corporation
- Saket Chadda
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for the electrochemical deposition and removal...
- Publication number 20040211662
- Publication date Oct 28, 2004
- Saket Chadda
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE
- Publication number 20040195110
- Publication date Oct 7, 2004
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for polishing copper on a workpiece surface
- Publication number 20030134576
- Publication date Jul 17, 2003
- Saket Chadda
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus for electrochemically depositing a material onto a workpi...
- Publication number 20030127320
- Publication date Jul 10, 2003
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for electrochemically depositing a material on...
- Publication number 20020148732
- Publication date Oct 17, 2002
- Ismail Emesh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Chemical mechanical polishing method and apparatus for removing mat...
- Publication number 20020151255
- Publication date Oct 17, 2002
- Tim Dyer
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus and process for polishing a workpiece
- Publication number 20020146908
- Publication date Oct 10, 2002
- Saket Chadda
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for electrochemical planarization of a workpiece
- Publication number 20020108861
- Publication date Aug 15, 2002
- Ismail Emesh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Abrasive free polishing in copper damascene applications
- Publication number 20020098784
- Publication date Jul 25, 2002
- Saket Chadda
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Saket Chadda

Person

Patents Grantslast 30 patents

Method and apparatus for electrochemical planarization of a workpiece

Orbiting indexable belt polishing station for chemical mechanical p...

Apparatus for electrochemically depositing a material onto a workpi...

Method and apparatus for the electrochemical deposition and removal...

Method and apparatus for electrochemical planarization of a workpiece

Apparatus and process for polishing a workpiece

Orbiting indexable belt polishing station for chemical mechanical p...

Method and apparatus for electrochemical planarization of a workpiece

Method and apparatus for electrochemically depositing a material on...

Method and apparatus for electrochemical planarization of a workpiece

Patents Applicationslast 30 patents

Method for polishing copper on a workpiece surface

METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE

ORBITING INDEXABLE BELT POLISHING STATION FOR CHEMICAL MECHANICAL P...

Method and apparatus for the electrochemical deposition and removal...

METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE

Method for polishing copper on a workpiece surface

Apparatus for electrochemically depositing a material onto a workpi...

Method and apparatus for electrochemically depositing a material on...

Chemical mechanical polishing method and apparatus for removing mat...

Apparatus and process for polishing a workpiece

Method and apparatus for electrochemical planarization of a workpiece

Abrasive free polishing in copper damascene applications