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Saki KATO
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Osaka, JP
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last 30 patents
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Patent Application
RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
Publication number
20240402600
Publication date
Dec 5, 2024
Sumitomo Chemical Company, Limited
Saki KATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SALT, ACID GENERATOR, RESIST COMPOSITION AND METHOD FOR PRODUCING R...
Publication number
20230266666
Publication date
Aug 24, 2023
Sumitomo Chemical Company, Limited
Katsuhiro KOMURO
C07 - ORGANIC CHEMISTRY
Information
Patent Application
SALT, ACID GENERATOR, RESIST COMPOSITION AND METHOD FOR PRODUCING R...
Publication number
20230152691
Publication date
May 18, 2023
Sumitomo Chemical Company, Limited
Katsuhiro KOMURO
C07 - ORGANIC CHEMISTRY
Information
Patent Application
SALT, ACID GENERATOR, RESIST COMPOSITION AND METHOD FOR PRODUCING R...
Publication number
20230139896
Publication date
May 4, 2023
Sumitomo Chemical Company, Limited
Katsuhiro KOMURO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY