Sam Do Lee

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Silicon oxide silicon nitride stack stair step etch
- Patent number 11,646,207
- Issue date May 9, 2023
- Lam Research Corporation
- Ce Qin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tungsten silicide etch process with reduced etch rate micro-loading
- Patent number 7,413,992
- Issue date Aug 19, 2008
- Lam Research Corporation
- Sok Kiow Tan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SILICON OXIDE SILICON NITRIDE STACK STAIR STEP ETCH
- Publication number 20210407811
- Publication date Dec 30, 2021
- LAM RESEARCH CORPORATION
- Ce QIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Tungsten silicide etch process with reduced etch rate micro-loading
- Publication number 20060273072
- Publication date Dec 7, 2006
- LAM RESEARCH CORPORATION
- Sok Kiow Tan
- H01 - BASIC ELECTRIC ELEMENTS