Sam F. Louke

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Portland, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Orbital motion chemical-mechanical polishing method and apparatus
- Patent number 6,095,904
- Issue date Aug 1, 2000
- Intel Corporation
- Joseph R. Breivogel
- B24 - GRINDING POLISHING
Information Patent Grant
Orbital motion chemical-mechanical polishing apparatus and method o...
- Patent number 5,554,064
- Issue date Sep 10, 1996
- Intel Corporation
- Joseph R. Breivogel
- B24 - GRINDING POLISHING
Information Patent Grant
Composite polishing pad for semiconductor process
- Patent number 5,212,910
- Issue date May 25, 1993
- Intel Corporation
- Joseph R. Breivogel
- B24 - GRINDING POLISHING