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Sam-Kyung Kim
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Kumi, KR
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Patents Grants
last 30 patents
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Patent Grant
Sensors for dynamically detecting substrate breakage and misalignme...
Patent number
7,834,994
Issue date
Nov 16, 2010
Applied Materials, Inc.
William A. Bagley
G01 - MEASURING TESTING
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Patent Grant
Sensors for dynamically detecting substrate breakage and misalignme...
Patent number
7,440,091
Issue date
Oct 21, 2008
Applied Materials, Inc.
William A. Bagley
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
SENSORS FOR DYNAMICALLY DETECTING SUBSTRATE BREAKAGE AND MISALIGNME...
Publication number
20090050270
Publication date
Feb 26, 2009
William A. Bagley
G01 - MEASURING TESTING
Information
Patent Application
Sensors for dynamically detecting substrate breakage and misalignme...
Publication number
20060087647
Publication date
Apr 27, 2006
William A. Bagley
G01 - MEASURING TESTING