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Sam X. Sun
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Rolla, MO, US
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Patents Grants
last 30 patents
Information
Patent Grant
On-track process for patterning hardmask by multiple dark field exp...
Patent number
8,415,083
Issue date
Apr 9, 2013
Brewer Science Inc.
Sam X. Sun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of creating photolithographic structures with developer-trim...
Patent number
8,168,372
Issue date
May 1, 2012
Brewer Science Inc.
Sam X. Sun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
On-track process for patterning hardmask by multiple dark field exp...
Patent number
8,133,659
Issue date
Mar 13, 2012
Brewer Science Inc.
Sam X. Sun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wet developable hard mask in conjunction with thin photoresist for...
Patent number
7,364,832
Issue date
Apr 29, 2008
Brewer Science Inc.
Sam X. Sun
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ON-TRACK PROCESS FOR PATTERNING HARDMASK BY MULTIPLE DARK FIELD EXP...
Publication number
20110223524
Publication date
Sep 15, 2011
BREWER SCIENCE INC.
Sam X. Sun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ON-TRACK PROCESS FOR PATTERNING HARDMASK BY MULTIPLE DARK FIELD EXP...
Publication number
20090191474
Publication date
Jul 30, 2009
BREWER SCIENCE INC.
Sam X. Sun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF CREATING PHOTOLITHOGRAPHIC STRUCTURES WITH DEVELOPER-TRIM...
Publication number
20080076064
Publication date
Mar 27, 2008
Sam X. Sun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Wet developable hard mask in conjunction with thin photoresist for...
Publication number
20050074699
Publication date
Apr 7, 2005
Sam X. Sun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY