Sam Yong Kim

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Lexington, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Gas distribution system for a post-etch treatment system
- Patent number 8,034,176
- Issue date Oct 11, 2011
- Tokyo Electron Limited
- Yuji Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Gas distribution system for a post-etch treatment system
- Publication number 20070235137
- Publication date Oct 11, 2007
- TOKYO ELECTON LIMITED
- Yuji Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS