Sami K. Hahto

Person

Albany, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ion source
- Patent number 11,017,974
- Issue date May 25, 2021
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generation system
- Patent number 10,153,134
- Issue date Dec 11, 2018
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generator with at least one non-metallic component
- Patent number 9,865,422
- Issue date Jan 9, 2018
- Nissin Ion Equipment Co., Ltd.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Beam current density distribution adjustment device and ion implanter
- Patent number 9,734,982
- Issue date Aug 15, 2017
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam line
- Patent number 9,502,213
- Issue date Nov 22, 2016
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic field sources for an ion source
- Patent number 9,275,819
- Issue date Mar 1, 2016
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam line
- Patent number 9,142,386
- Issue date Sep 22, 2015
- Nissin Ion Equipment Co., Ltd.
- Sami K Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source having at least one electron gun comprising a gas inlet...
- Patent number 8,994,272
- Issue date Mar 31, 2015
- Nissin Ion Equipment Co., Ltd.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
External cathode ion source
- Patent number 8,502,161
- Issue date Aug 6, 2013
- Semequip, Inc.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam apparatus and method employing magnetic scanning
- Patent number 8,436,326
- Issue date May 7, 2013
- Semequip, Inc.
- Hilton F. Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi mode ion source
- Patent number 8,330,118
- Issue date Dec 11, 2012
- Semequip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam apparatus and method for ion implantation
- Patent number 8,110,820
- Issue date Feb 7, 2012
- SemEquip, Inc.
- Hilton F. Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for extracting ion beams composed of molecular io...
- Patent number 7,928,406
- Issue date Apr 19, 2011
- Semequip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam apparatus and method employing magnetic scanning
- Patent number 7,851,773
- Issue date Dec 14, 2010
- Semiquip, Inc.
- Hilton F. Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
External cathode ion source
- Patent number 7,838,850
- Issue date Nov 23, 2010
- Semequip, Inc.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Negative ion source with external RF antenna
- Patent number 7,176,469
- Issue date Feb 13, 2007
- The Regents of the University of California
- Ka-Ngo Leung
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
VAPORIZER, ION SOURCE AND METHOD FOR GENERATING ALUMINUM-CONTAINING...
- Publication number 20240098869
- Publication date Mar 21, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- George SACCO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
VAPORIZER, ION SOURCE AND METHOD FOR GENERATING ALUMINUM-CONTAINING...
- Publication number 20230326702
- Publication date Oct 12, 2023
- NISSIN ION EQUIPMENT CO., LTD.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Substrate Cooling
- Publication number 20200294819
- Publication date Sep 17, 2020
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Source
- Publication number 20180138008
- Publication date May 17, 2018
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Implanter
- Publication number 20180138007
- Publication date May 17, 2018
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Generator With at Least One Non-Metallic Component
- Publication number 20160086759
- Publication date Mar 24, 2016
- NISSIN ION EQUIPMENT CO., LTD.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Beam Line
- Publication number 20160005570
- Publication date Jan 7, 2016
- NISSIN ION EQUIPMENT CO., LTD.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM LINE
- Publication number 20140261171
- Publication date Sep 18, 2014
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Source
- Publication number 20140265854
- Publication date Sep 18, 2014
- NISSIN ION EQUIPMENT CO., LTD.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnetic Field Sources For An Ion Source
- Publication number 20140265856
- Publication date Sep 18, 2014
- NISSIN ION EQUIPMENT CO., LTD.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM APPARATUS AND METHOD EMPLOYING MAGNETIC SCANNING
- Publication number 20110089321
- Publication date Apr 21, 2011
- SemEquip, Inc.
- Hilton F. Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTERNAL CATHODE ION SOURCE
- Publication number 20100320395
- Publication date Dec 23, 2010
- SemEquip, Inc.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIRAL RF-INDUCTION ANTENNA BASED ION SOURCE FOR NEUTRON GENERATORS
- Publication number 20100066252
- Publication date Mar 18, 2010
- The Regents of the University of California
- Jani Petteri Reijonen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
5 NS OR LESS NEUTRON AND GAMMA PULSE GENERATOR
- Publication number 20100025573
- Publication date Feb 4, 2010
- The Regents of the University of California
- Sami K. Hahto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTI MODE ION SOURCE
- Publication number 20090283695
- Publication date Nov 19, 2009
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM APPARATUS AND METHOD EMPLOYING MAGNETIC SCANNING
- Publication number 20090261248
- Publication date Oct 22, 2009
- Hilton F. Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM APPARATUS AND METHOD FOR ION IMPLANTATION
- Publication number 20090206270
- Publication date Aug 20, 2009
- SEMEQUIP, INC.
- Hilton F. Glayish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTERNAL CATHODE ION SOURCE
- Publication number 20090014667
- Publication date Jan 15, 2009
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR EXTRACTING ION BEAMS COMPOSED OF MOLECULAR IO...
- Publication number 20080290266
- Publication date Nov 27, 2008
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Negative ion source with external RF antenna
- Publication number 20040104683
- Publication date Jun 3, 2004
- Ka-Ngo Leung
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Sami K. Hahto

Person

Patents Grantslast 30 patents

Ion source

Plasma generation system

Plasma generator with at least one non-metallic component

Beam current density distribution adjustment device and ion implanter

Ion beam line

Magnetic field sources for an ion source

Ion beam line

Ion source having at least one electron gun comprising a gas inlet...

External cathode ion source

Ion beam apparatus and method employing magnetic scanning

Multi mode ion source

Ion beam apparatus and method for ion implantation

Method and system for extracting ion beams composed of molecular io...

Ion beam apparatus and method employing magnetic scanning

External cathode ion source

Negative ion source with external RF antenna

Patents Applicationslast 30 patents

VAPORIZER, ION SOURCE AND METHOD FOR GENERATING ALUMINUM-CONTAINING...

VAPORIZER, ION SOURCE AND METHOD FOR GENERATING ALUMINUM-CONTAINING...

Systems and Methods for Substrate Cooling

Ion Source

Ion Implanter

Plasma Generator With at Least One Non-Metallic Component

Ion Beam Line

ION BEAM LINE

Ion Source

Magnetic Field Sources For An Ion Source

ION BEAM APPARATUS AND METHOD EMPLOYING MAGNETIC SCANNING

EXTERNAL CATHODE ION SOURCE

SPIRAL RF-INDUCTION ANTENNA BASED ION SOURCE FOR NEUTRON GENERATORS

5 NS OR LESS NEUTRON AND GAMMA PULSE GENERATOR

MULTI MODE ION SOURCE

ION BEAM APPARATUS AND METHOD EMPLOYING MAGNETIC SCANNING

ION BEAM APPARATUS AND METHOD FOR ION IMPLANTATION

EXTERNAL CATHODE ION SOURCE

METHOD AND SYSTEM FOR EXTRACTING ION BEAMS COMPOSED OF MOLECULAR IO...

Negative ion source with external RF antenna