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Veldhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Measuring method, apparatus and substrate
Patent number
10,151,987
Issue date
Dec 11, 2018
ASML Netherlands B.V.
David Deckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sub-wavelength segmentation in measurement targets on substrates
Patent number
9,746,785
Issue date
Aug 29, 2017
ASML Netherlands B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment measurement system, lithographic apparatus, and a method...
Patent number
9,280,057
Issue date
Mar 8, 2016
ASML Netherlands B.V.
Franciscus Godefridus Casper Bijnen
G01 - MEASURING TESTING
Information
Patent Grant
Alignment measurement system, lithographic apparatus, and a method...
Patent number
9,046,385
Issue date
Jun 2, 2015
ASML Netherlands B.V.
Franciscus Godefridus Casper Bijnen
G01 - MEASURING TESTING
Information
Patent Grant
Marker structure and method of forming the same
Patent number
8,319,967
Issue date
Nov 27, 2012
ASML Netherlands B.V.
Richard Johannes Franciscus Van Haren
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Lithographic apparatus
Patent number
8,243,259
Issue date
Aug 14, 2012
ASML Netherlands B.V.
Vitally Prosyentsov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sub-segmented alignment mark arrangement
Patent number
8,203,692
Issue date
Jun 19, 2012
ASML Netherlands B.V.
Sami Musa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment method, alignment system, and product with alignment mark
Patent number
8,072,615
Issue date
Dec 6, 2011
ASML Netherlands B.V.
Sami Musa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Application of 2-dimensional photonic crystals in alignment devices
Patent number
7,944,063
Issue date
May 17, 2011
ASML Netherlands B.V.
Richard Johannes Franciscus Van Haren
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Binary sinusoidal sub-wavelength gratings as alignment marks
Patent number
7,863,763
Issue date
Jan 4, 2011
ASML Netherlands B.V.
Richard Johannes Franciscus Van Haren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment devices and methods for providing phase depth control
Patent number
7,737,566
Issue date
Jun 15, 2010
ASML Netherlands B.V.
Richard Johannes Franciscus Van Haren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for enhanced lithographic alignment
Patent number
7,598,024
Issue date
Oct 6, 2009
ASML Netherlands B.V.
Sanjaysingh Lalbahadoersing
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for CD determination using an alignment sensor of...
Patent number
7,545,520
Issue date
Jun 9, 2009
ASML Netherlands B.V.
Hyun-Woo Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment tool for a lithographic apparatus
Patent number
7,460,231
Issue date
Dec 2, 2008
ASML Netherlands B.V.
Sami Musa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Alignment Measurement System, Lithographic Apparatus, and a Method...
Publication number
20150261100
Publication date
Sep 17, 2015
ASML NETHERLANDS B.V.
Franciscus Godefridus Casper BIJNEN
G01 - MEASURING TESTING
Information
Patent Application
MARKER STRUCTURE AND METHOD OF FORMING THE SAME
Publication number
20130070226
Publication date
Mar 21, 2013
ASML NETHERLANDS B.V.
Richard Johannes Franciscus Van Haren
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
MEASURING METHOD, APPARATUS AND SUBSTRATE
Publication number
20120133938
Publication date
May 31, 2012
ASML NETHERLANDS B.V.
David DECKERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment Measurement System, Lithographic Apparatus, and a Method...
Publication number
20120062863
Publication date
Mar 15, 2012
ASML NETHERLANDS B.V.
Franciscus Godefridus Casper BIJNEN
G01 - MEASURING TESTING
Information
Patent Application
PRODUCTION OF AN ALIGNMENT MARK
Publication number
20110273685
Publication date
Nov 10, 2011
ASML NETHERLANDS B.V.
Chung-Hsun LI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Sub-Wavelength Segmentation in Measurement Targets on Substrates
Publication number
20110204484
Publication date
Aug 25, 2011
ASMD NETHERLANDS B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20090316122
Publication date
Dec 24, 2009
ASML NETHERLANDS B.V.
Vitaliy Prosyentsov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUB-SEGMENTED ALIGNMENT MARK ARRANGEMENT
Publication number
20090310113
Publication date
Dec 17, 2009
ASML NETHERLANDS B.V.
Sami Musa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment Method, Alignment System, and Product with Alignment Mark
Publication number
20090153861
Publication date
Jun 18, 2009
ASML NETHERLANDS B.V.
Sami MUSA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MARKER STRUCTURE AND METHOD OF FORMING THE SAME
Publication number
20090147232
Publication date
Jun 11, 2009
ASML NETHERLANDS B.V.
Richard Johannes Franciscus Van Haren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and method for CD determination using an alignment sensor of...
Publication number
20080111995
Publication date
May 15, 2008
ASML NETHERLANDS B.V.
Hyun-Woo Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment tool for a lithographic apparatus
Publication number
20070222990
Publication date
Sep 27, 2007
ASML NETHERLANDS B.V.
Sami Musa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and system for enhanced lithographic patterning
Publication number
20070212648
Publication date
Sep 13, 2007
ASML NETHERLANDS B.V.
Sanjaysingh Lalbahadoersing
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and system for enhanced lithographic alignment
Publication number
20070212652
Publication date
Sep 13, 2007
ASML NETHERLANDS B.V.
Sanjaysingh Lalbahadoersing
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and system for enhanced lithographic patterning
Publication number
20070212649
Publication date
Sep 13, 2007
ASML NETHERLANDS B.V.
Sanjaysingh Lalbahadoersing
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment devices and methods for providing phase depth control
Publication number
20070132996
Publication date
Jun 14, 2007
ASML NETHERLANDS B.V.
Richard Johannes Franciscus Van Haren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Binary sinusoidal sub-wavelength gratings as alignment marks
Publication number
20070114678
Publication date
May 24, 2007
ASML NETHERLANDS B.V.
Richard Johannes Franciscus Van Haren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Application of 2-dimensional photonic crystals in alignment devices
Publication number
20060279735
Publication date
Dec 14, 2006
ASML NETHERLANDS B.V.
Richard Johannes Franciscus Van Haren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY