Samuel Chu-Chiang Hsu

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Retaining ring having inner surfaces with features
- Patent number 12,048,981
- Issue date Jul 30, 2024
- Applied Materials, Inc.
- Steven Mark Reedy
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring having inner surfaces with facets
- Patent number 12,033,865
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring having inner surfaces with facets
- Patent number 11,682,561
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Retaining ring having inner surfaces with features
- Patent number 11,453,099
- Issue date Sep 27, 2022
- Applied Materials, Inc.
- Steven Mark Reedy
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring having inner surfaces with facets
- Patent number 11,056,350
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring having inner surfaces with features
- Patent number 10,500,695
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Steven Mark Reedy
- B24 - GRINDING POLISHING
Information Patent Grant
Inner retaining ring and outer retaining ring for carrier head
- Patent number 10,022,837
- Issue date Jul 17, 2018
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Configurable pressure design for multizone chemical mechanical plan...
- Patent number 9,610,672
- Issue date Apr 4, 2017
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring with selected stiffness and thickness
- Patent number 9,492,905
- Issue date Nov 15, 2016
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring having inner surfaces with facets
- Patent number 9,368,371
- Issue date Jun 14, 2016
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Monitoring retaining ring thickness and pressure control
- Patent number 9,067,295
- Issue date Jun 30, 2015
- Applied Materials, Inc.
- Sameer Deshpande
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head zone boundary smoothing
- Patent number 9,050,699
- Issue date Jun 9, 2015
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatus for an improved polishing head retaining ring
- Patent number 9,050,700
- Issue date Jun 9, 2015
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring with selected stiffness and thickness
- Patent number 8,998,676
- Issue date Apr 7, 2015
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Inner retaining ring and outer retaining ring for carrier head
- Patent number 8,840,446
- Issue date Sep 23, 2014
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with narrow inner ring and wide outer ring
- Patent number 8,721,391
- Issue date May 13, 2014
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for temperature control during polishing
- Patent number 8,591,286
- Issue date Nov 26, 2013
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head zone boundary smoothing
- Patent number 8,460,067
- Issue date Jun 11, 2013
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
RETAINING RING HAVING INNER SURFACES WITH FEATURES
- Publication number 20240316723
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Steven Mark Reedy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Retaining Ring Having Inner Surfaces with Facets
- Publication number 20230290645
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
RETAINING RING HAVING INNER SURFACES WITH FEATURES
- Publication number 20230019815
- Publication date Jan 19, 2023
- Applied Materials, Inc.
- Steven Mark Reedy
- B24 - GRINDING POLISHING
Information Patent Application
Retaining Ring Having Inner Surfaces with Facets
- Publication number 20210249276
- Publication date Aug 12, 2021
- Applied Materials, Inc.
- Jeonghoon Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Retaining Ring Having Inner Surfaces with Features
- Publication number 20200114489
- Publication date Apr 16, 2020
- Applied Materials, Inc.
- Steven Mark Reedy
- B24 - GRINDING POLISHING
Information Patent Application
Retaining Ring Having Inner Surfaces with Features
- Publication number 20160346897
- Publication date Dec 1, 2016
- Applied Materials, Inc.
- Steven Mark Reedy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, APPARATUS, AND METHODS FOR AN IMPROVED POLISHING HEAD GIMB...
- Publication number 20160176014
- Publication date Jun 23, 2016
- Applied Materials, Inc.
- Jay Gurusamy
- B24 - GRINDING POLISHING
Information Patent Application
RETAINING RING HAVING INNER SURFACES WITH FACETS
- Publication number 20160151879
- Publication date Jun 2, 2016
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
INNER RETAINING RING AND OUTER RETAINING RING FOR CARRIER HEAD
- Publication number 20160082571
- Publication date Mar 24, 2016
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
CONFIGURABLE PRESSURE DESIGN FOR MULTIZONE CHEMICAL MECHANICAL PLAN...
- Publication number 20160059377
- Publication date Mar 3, 2016
- Applied Materials, Inc.
- Jeonghoon OH
- B24 - GRINDING POLISHING
Information Patent Application
Retaining Ring Having Inner Surfaces with Facets
- Publication number 20150303070
- Publication date Oct 22, 2015
- Applied Materials, Inc.
- Jeonghoon Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETAINING RING WITH SELECTED STIFFNESS AND THICKNESS
- Publication number 20150209930
- Publication date Jul 30, 2015
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
CHEMICAL MECHANICAL POLISHING RETAINING RING METHODS AND APPARATUS
- Publication number 20150021498
- Publication date Jan 22, 2015
- Applied Materials, Inc.
- Samuel Hsu
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHODS AND APPARATUS FOR A NON-CONTACT EDGE POLISHING MODULE USING...
- Publication number 20140308813
- Publication date Oct 16, 2014
- Applied Materials, Inc.
- Samuel Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PRECESSION MECHANISM FOR CMP POLISHING HEAD
- Publication number 20140273756
- Publication date Sep 18, 2014
- Chih Hung CHEN
- B24 - GRINDING POLISHING
Information Patent Application
RETAINING RING WITH SELECTED STIFFNESS AND THICKNESS
- Publication number 20140120803
- Publication date May 1, 2014
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
Monitoring Retaining Ring Thickness And Pressure Control
- Publication number 20140027407
- Publication date Jan 30, 2014
- Sameer Deshpande
- B24 - GRINDING POLISHING
Information Patent Application
Sensors in Carrier Head of a CMP System
- Publication number 20140020829
- Publication date Jan 23, 2014
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD ZONE BOUNDARY SMOOTHING
- Publication number 20130252518
- Publication date Sep 26, 2013
- Applied Materials, Inc.
- Hung Chih CHEN
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND APPARATUS FOR AN IMPROVED POLISHING HEAD RETAINING RING
- Publication number 20130196577
- Publication date Aug 1, 2013
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
INNER RETAINING RING AND OUTER RETAINING RING FOR CARRIER HEAD
- Publication number 20130149942
- Publication date Jun 13, 2013
- Hung Chih Chen
- B24 - GRINDING POLISHING

Samuel Chu-Chiang Hsu

Person

Patents Grantslast 30 patents

Retaining ring having inner surfaces with features

Retaining ring having inner surfaces with facets

Retaining ring having inner surfaces with facets

Retaining ring having inner surfaces with features

Retaining ring having inner surfaces with facets

Retaining ring having inner surfaces with features

Inner retaining ring and outer retaining ring for carrier head

Configurable pressure design for multizone chemical mechanical plan...

Retaining ring with selected stiffness and thickness

Retaining ring having inner surfaces with facets

Monitoring retaining ring thickness and pressure control

Polishing head zone boundary smoothing

Methods and apparatus for an improved polishing head retaining ring

Retaining ring with selected stiffness and thickness

Inner retaining ring and outer retaining ring for carrier head

Carrier head with narrow inner ring and wide outer ring

Apparatus and method for temperature control during polishing

Polishing head zone boundary smoothing

Patents Applicationslast 30 patents

RETAINING RING HAVING INNER SURFACES WITH FEATURES

Retaining Ring Having Inner Surfaces with Facets

RETAINING RING HAVING INNER SURFACES WITH FEATURES

Retaining Ring Having Inner Surfaces with Facets

Retaining Ring Having Inner Surfaces with Features

Retaining Ring Having Inner Surfaces with Features

SYSTEMS, APPARATUS, AND METHODS FOR AN IMPROVED POLISHING HEAD GIMB...

RETAINING RING HAVING INNER SURFACES WITH FACETS

INNER RETAINING RING AND OUTER RETAINING RING FOR CARRIER HEAD

CONFIGURABLE PRESSURE DESIGN FOR MULTIZONE CHEMICAL MECHANICAL PLAN...

Retaining Ring Having Inner Surfaces with Facets

RETAINING RING WITH SELECTED STIFFNESS AND THICKNESS

CHEMICAL MECHANICAL POLISHING RETAINING RING METHODS AND APPARATUS

METHODS AND APPARATUS FOR A NON-CONTACT EDGE POLISHING MODULE USING...

SUBSTRATE PRECESSION MECHANISM FOR CMP POLISHING HEAD

RETAINING RING WITH SELECTED STIFFNESS AND THICKNESS

Monitoring Retaining Ring Thickness And Pressure Control

Sensors in Carrier Head of a CMP System

POLISHING HEAD ZONE BOUNDARY SMOOTHING

METHODS AND APPARATUS FOR AN IMPROVED POLISHING HEAD RETAINING RING

INNER RETAINING RING AND OUTER RETAINING RING FOR CARRIER HEAD