Samuel Chu-Chiang Hsu

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Palo Alto, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR TEMPERATURE CONTROL DURING POLISHING
- Publication number 20120040592
- Publication date Feb 16, 2012
- Applied Materials, Inc.
- HUNG CHIH CHEN
- B24 - GRINDING POLISHING
Information Patent Application
CARRIER HEAD WITH NARROW INNER RING AND WIDE OUTER RING
- Publication number 20120034849
- Publication date Feb 9, 2012
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE HOLDER TO REDUCE SUBSTRATE EDGE STRESS DURING CHEMICAL ME...
- Publication number 20120021673
- Publication date Jan 26, 2012
- Applied Materials, Inc.
- HUNG CHIH CHEN
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD ZONE BOUNDARY SMOOTHING
- Publication number 20100291842
- Publication date Nov 18, 2010
- Applied Materials, Inc.
- HUNG CHIH CHEN
- B24 - GRINDING POLISHING
Information Patent Application
CARRIER HEAD USING FLEXURE RESTRAINTS FOR RETAINING RING ALIGNMENT
- Publication number 20100062694
- Publication date Mar 11, 2010
- APPLIED MATERIALS, INC.
- Jin Yi
- B24 - GRINDING POLISHING