Samuel Kalt

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Reutlingen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle-optical systems, methods and components
- Patent number 8,039,813
- Issue date Oct 18, 2011
- Carl Zeiss SMT GmbH
- Antonio Casares
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Membrane mask for electron beam lithography
- Patent number 6,004,700
- Issue date Dec 21, 1999
- International Business Machines Corporation
- Johann Greschner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Manufacturing method for membrane lithography mask with mask fields
- Patent number 5,935,739
- Issue date Aug 10, 1999
- International Business Machines Corporation
- Thomas Bayer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Particle-Optical Component
- Publication number 20090114818
- Publication date May 7, 2009
- Carl Zeiss SMT AG
- Antonio Casares
- H01 - BASIC ELECTRIC ELEMENTS