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Samuel L. Thompson
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Pleasanton, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Compliant layer chucking surface
Patent number
6,835,415
Issue date
Dec 28, 2004
EUV LLC
Kenneth L. Blaedel
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Compliant layer chucking surface
Publication number
20040131775
Publication date
Jul 8, 2004
The Regents of the University of California.
Kenneth L. Blaedel
H01 - BASIC ELECTRIC ELEMENTS