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Samuel Sung Shik Choi
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Beacon, NY, US
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Patent Application
BILAYER TRENCH FIRST HARDMASK STRUCTURE AND PROCESS FOR REDUCED DE...
Publication number
20120187546
Publication date
Jul 26, 2012
International Business Machines Corporation
Hakeem B.S. Akinmade-Yusuff
H01 - BASIC ELECTRIC ELEMENTS