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San Leong Liew
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Singapore, SG
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last 30 patents
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Patent Grant
Entire encapsulation of Cu interconnects using self-aligned CuSiN film
Patent number
7,524,755
Issue date
Apr 28, 2009
Chartered Semiconductor Manufacturing, Ltd.
Johnny Widodo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to form alpha phase Ta and its application to IC manufacturing
Patent number
7,294,241
Issue date
Nov 13, 2007
Chartered Semiconductor Manufacturing Ltd.
Chim Seng Seet
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Entire encapsulation of Cu interconnects using self-aligned CuSiN film
Publication number
20070197023
Publication date
Aug 23, 2007
CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
Johnny Widodo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method to form alpha phase Ta and its application to IC manufacturing
Publication number
20040131878
Publication date
Jul 8, 2004
Chim Seng Seet
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...