Sandeep Mehta

Person

Berverly, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Techniques for temperature controlled ion implantation
- Patent number 7,993,698
- Issue date Aug 9, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Julian Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-uniform ion implantation
- Patent number 7,544,957
- Issue date Jun 9, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Walther
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ surface contamination removal for ion implanting
- Patent number 7,544,959
- Issue date Jun 9, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Walther
- B08 - CLEANING
Information Patent Grant
Ion implant beam angle integrity monitoring and adjusting
- Patent number 7,459,703
- Issue date Dec 2, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Steven Walther
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma implantation of deuterium for passivation of semiconductor-d...
- Patent number 7,378,335
- Issue date May 27, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Walther
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma ion implantation systems and methods using solid source of d...
- Patent number 7,326,937
- Issue date Feb 5, 2008
- Verian Semiconductor Equipment Associates, Inc.
- Sandeep Mehta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation with improved ion source life expectancy
- Patent number 6,756,600
- Issue date Jun 29, 2004
- Advanced Micro Devices, Inc.
- Che-Hoo Ng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IN SITU SURFACE CONTAMINATION REMOVAL FOR ION IMPLANTING
- Publication number 20080185537
- Publication date Aug 7, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Steve Walther
- B08 - CLEANING
Information Patent Application
Techniques for temperature controlled ion implantation
- Publication number 20080076194
- Publication date Mar 27, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Julian Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Non-uniform ion implantation
- Publication number 20080067434
- Publication date Mar 20, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Walther
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma implantation of deuterium for passivation of semiconductor-d...
- Publication number 20070123012
- Publication date May 31, 2007
- Steven R. Walther
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for plasma implantation with improved dopant...
- Publication number 20070069157
- Publication date Mar 29, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Sandeep Mehta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion implant beam angle integrity monitoring and adjusting
- Publication number 20070045569
- Publication date Mar 1, 2007
- Steven Walther
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metal work function adjustment by ion implantation
- Publication number 20070048984
- Publication date Mar 1, 2007
- Steven Walther
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma ion implantation systems and methods using solid source of d...
- Publication number 20060219952
- Publication date Oct 5, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Sandeep Mehta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shallow-junction fabrication in semiconductor devices via plasma im...
- Publication number 20060205192
- Publication date Sep 14, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Walther
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma implantation using halogenated dopant species to limit depos...
- Publication number 20060099830
- Publication date May 11, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Walther
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In situ surface contaminant removal for ion implanting
- Publication number 20060040499
- Publication date Feb 23, 2006
- Steve Walther
- B08 - CLEANING
Information Patent Application
ION IMPLANTATION WITH IMPROVED ION SOURCE LIFE EXPECTANCY
- Publication number 20020000523
- Publication date Jan 3, 2002
- CHE-HOO NG
- H01 - BASIC ELECTRIC ELEMENTS

Sandeep Mehta

Person

Patents Grantslast 30 patents

Techniques for temperature controlled ion implantation

Non-uniform ion implantation

In situ surface contamination removal for ion implanting

Ion implant beam angle integrity monitoring and adjusting

Plasma implantation of deuterium for passivation of semiconductor-d...

Plasma ion implantation systems and methods using solid source of d...

Ion implantation with improved ion source life expectancy

Patents Applicationslast 30 patents

IN SITU SURFACE CONTAMINATION REMOVAL FOR ION IMPLANTING

Techniques for temperature controlled ion implantation

Non-uniform ion implantation

Plasma implantation of deuterium for passivation of semiconductor-d...

Methods and apparatus for plasma implantation with improved dopant...

Ion implant beam angle integrity monitoring and adjusting

Metal work function adjustment by ion implantation

Plasma ion implantation systems and methods using solid source of d...

Shallow-junction fabrication in semiconductor devices via plasma im...

Plasma implantation using halogenated dopant species to limit depos...

In situ surface contaminant removal for ion implanting

ION IMPLANTATION WITH IMPROVED ION SOURCE LIFE EXPECTANCY