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Sandeep Nijwahan
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Los Altos, CA, US
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last 30 patents
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Patent Application
DECONTAMINATION OF MOCVD CHAMBER USING NH3 PURGE AFTER IN-SITU CLEA...
Publication number
20100273291
Publication date
Oct 28, 2010
Applied Materials, Inc.
Olga Kryliouk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...