Sander Bas ROOBOL

Person

Veldhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for predicting performance of a measurement m...
- Patent number 11,626,704
- Issue date Apr 11, 2023
- ASML Netherlands B.V.
- Sietse Thijmen Van Der Post
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for determining a radiation beam intensity pro...
- Patent number 11,353,796
- Issue date Jun 7, 2022
- ASML Netherlands B.V.
- Teis Johan Coenen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method and apparatus for detecting substrate surface variations
- Patent number 11,092,902
- Issue date Aug 17, 2021
- ASML Netherlands B.V.
- Johannes Franciscus Martinus D'Achard Van Enschut
- G01 - MEASURING TESTING
Information Patent Grant
Methods of aligning a diffractive optical system and diffracting be...
- Patent number 10,983,361
- Issue date Apr 20, 2021
- ASML Netherlands B.V.
- Sander Bas Roobol
- G02 - OPTICS
Information Patent Grant
Optical detector
- Patent number 10,976,265
- Issue date Apr 13, 2021
- ASML Netherlands B.V.
- Sander Bas Roobol
- G01 - MEASURING TESTING
Information Patent Grant
HHG source, inspection apparatus and method for performing a measur...
- Patent number 10,816,906
- Issue date Oct 27, 2020
- ASML Netherlands B.V.
- Nan Lin
- G02 - OPTICS
Information Patent Grant
Determining an edge roughness parameter of a periodic structure
- Patent number 10,725,387
- Issue date Jul 28, 2020
- ASML Netherlands B.V.
- Teis Johan Coenen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology apparatus for and a method of determining a characteristi...
- Patent number 10,670,974
- Issue date Jun 2, 2020
- ASML Netherlands B.V.
- Gerrit Jacobus Hendrik Brussaard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination source for an inspection apparatus, inspection apparat...
- Patent number 10,649,344
- Issue date May 12, 2020
- ASML Netherlands B.V.
- Sander Bas Roobol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for delivering gas and illumination source for generating...
- Patent number 10,630,037
- Issue date Apr 21, 2020
- ASML Netherlands B.V.
- Sudhir Srivastava
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspection and metrology
- Patent number 10,578,979
- Issue date Mar 3, 2020
- ASML Netherlands B.V.
- Sietse Thijmen Van Der Post
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for delivering gas and illumination source for generating...
- Patent number 10,530,111
- Issue date Jan 7, 2020
- ASML Netherlands B.V.
- Sudhir Srivastava
- G01 - MEASURING TESTING
Information Patent Grant
Illumination source for an inspection apparatus, inspection apparat...
- Patent number 10,451,559
- Issue date Oct 22, 2019
- ASML Netherlands B.V.
- Peter Danny Van Voorst
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for predicting performance of a measurement m...
- Patent number 10,379,448
- Issue date Aug 13, 2019
- ASML Netherlands B.V.
- Simon Gijsbert Josephus Mathijssen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination source for an inspection apparatus, inspection apparat...
- Patent number 10,330,606
- Issue date Jun 25, 2019
- ASML Netherlands B.V.
- Peter Danny Van Voorst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination source for an inspection apparatus, inspection apparat...
- Patent number 10,267,744
- Issue date Apr 23, 2019
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for inspection and metrology
- Patent number 10,248,029
- Issue date Apr 2, 2019
- ASML Netherlands B.V.
- Sietse Thijmen Van Der Post
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
HHG source, inspection apparatus and method for performing a measur...
- Patent number 10,234,771
- Issue date Mar 19, 2019
- ASML Netherlands B.V.
- Nan Lin
- G02 - OPTICS
Information Patent Grant
Method and apparatus for determining the property of a structure, d...
- Patent number 10,133,192
- Issue date Nov 20, 2018
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and method for performing a measurement
- Patent number 10,067,068
- Issue date Sep 4, 2018
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for generating illuminating radiation
- Patent number 10,048,596
- Issue date Aug 14, 2018
- ASML Netherlands B.V.
- Nan Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METROLOGY MEASUREMENT METHOD AND APPARATUS
- Publication number 20240255279
- Publication date Aug 1, 2024
- ASML NETHERLANDS B.V.
- Han-Kwang NIENHUYS
- G01 - MEASURING TESTING
Information Patent Application
ASSEMBLY FOR SEPARATING RADIATION IN THE FAR FIELD
- Publication number 20240168392
- Publication date May 23, 2024
- ASML NETHERLANDS B.V.
- Petrus Wilhelmus SMORENBURG
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHOD FOR CORRECTING MEASUREMENTS IN THE MANUFACTURE OF INTEGRATED...
- Publication number 20230040124
- Publication date Feb 9, 2023
- ASML NETHERLANDS B.V.
- Han-Kwang NIENHUYS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REFLECTOR MANUFACTURING METHOD AND ASSOCIATED REFLECTOR
- Publication number 20220134693
- Publication date May 5, 2022
- ASML NETHERLANDS B.V.
- Sander Bas ROOBOL
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Method and Apparatus for Determining a Radiation Beam Intensity Pro...
- Publication number 20200098486
- Publication date Mar 26, 2020
- ASML NETHERLANDS B.V.
- Teis Johan COENEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus For Delivering Gas and Illumination Source for Generating...
- Publication number 20190212657
- Publication date Jul 11, 2019
- ASML NETHERLANDS B.V.
- Sudhir SRIVASTAVA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
- Publication number 20190212655
- Publication date Jul 11, 2019
- ASML NETHERLANDS B.V.
- Sietse Thijmen VAN DER POST
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology Apparatus for and a Method of Determining a Characteristi...
- Publication number 20190204757
- Publication date Jul 4, 2019
- ASML NETHERLANDS B.V.
- Gerrit Jacobus Hendrik BRUSSAARD
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HHG Source, Inspection Apparatus and Method for Performing a Measur...
- Publication number 20190155171
- Publication date May 23, 2019
- ASML NETHERLANDS B.V.
- Nan LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical Detector
- Publication number 20190049393
- Publication date Feb 14, 2019
- ASML NETHERLANDS B.V.
- Sander Bas ROOBOL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETERMINING AN EDGE ROUGHNESS PARAMETER OF A PERIODIC STRUCTURE
- Publication number 20190025706
- Publication date Jan 24, 2019
- ASML NETHERLANDS B.V.
- Teis Johan COENEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination Source for an Inspection Apparatus, Inspection Apparat...
- Publication number 20190003981
- Publication date Jan 3, 2019
- ASML NETHERLANDS B.V.
- Peter Danny Van Voorst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus For Delivering Gas and Illumination Source for Generating...
- Publication number 20180267411
- Publication date Sep 20, 2018
- ASML NETHERLANDS B.V.
- Sudhir SRIVASTAVA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and Apparatus for Predicting Performance of a Measurement M...
- Publication number 20180254597
- Publication date Sep 6, 2018
- ASML NETHERLANDS B.V.
- Sietse Thijmen VAN DER POST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of Aligning a Diffractive Optical System and Diffracting Be...
- Publication number 20180239160
- Publication date Aug 23, 2018
- ASML NETHERLANDS B.V.
- Sander Bas Roobol
- G02 - OPTICS
Information Patent Application
METHODS AND APPARATUS FOR PREDICTING PERFORMANCE OF A MEASUREMENT M...
- Publication number 20180224753
- Publication date Aug 9, 2018
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
- Publication number 20180188658
- Publication date Jul 5, 2018
- ASML NETHERLANDS B.V.
- Sietse Thijmen VAN DER POST
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination Source for an Inspection Apparatus, Inspection Apparat...
- Publication number 20180136568
- Publication date May 17, 2018
- ASML NETHERLANDS B.V.
- Sander Bas ROOBOL
- G02 - OPTICS
Information Patent Application
Illumination Source for an Inspection Apparatus, Inspection Apparat...
- Publication number 20180073992
- Publication date Mar 15, 2018
- ASML NETHERLANDS B.V.
- Peter Danny VAN VOORST
- G01 - MEASURING TESTING
Information Patent Application
Illumination Source for an Inspection Apparatus, Inspection Apparat...
- Publication number 20180011029
- Publication date Jan 11, 2018
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G02 - OPTICS
Information Patent Application
Method and Apparatus for Generating Illuminating Radiation
- Publication number 20170322497
- Publication date Nov 9, 2017
- ASML NETHERLANDS B.V.
- Nan LIN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
HHG Source, Inspection Apparatus and Method for Performing a Measur...
- Publication number 20170315456
- Publication date Nov 2, 2017
- ASML NETHERLANDS B.V.
- Nan LIN
- G02 - OPTICS
Information Patent Application
Method and Apparatus for Determining the Property of a Structure, D...
- Publication number 20170315055
- Publication date Nov 2, 2017
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G01 - MEASURING TESTING
Information Patent Application
Lithographic Apparatus and Method for Performing a Measurement
- Publication number 20170184511
- Publication date Jun 29, 2017
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G01 - MEASURING TESTING

Sander Bas ROOBOL

Person

Patents Grantslast 30 patents

Methods and apparatus for predicting performance of a measurement m...

Method and apparatus for determining a radiation beam intensity pro...

Method and apparatus for detecting substrate surface variations

Methods of aligning a diffractive optical system and diffracting be...

Optical detector

HHG source, inspection apparatus and method for performing a measur...

Determining an edge roughness parameter of a periodic structure

Metrology apparatus for and a method of determining a characteristi...

Illumination source for an inspection apparatus, inspection apparat...

Apparatus for delivering gas and illumination source for generating...

Method and apparatus for inspection and metrology

Apparatus for delivering gas and illumination source for generating...

Illumination source for an inspection apparatus, inspection apparat...

Methods and apparatus for predicting performance of a measurement m...

Illumination source for an inspection apparatus, inspection apparat...

Illumination source for an inspection apparatus, inspection apparat...

Method and apparatus for inspection and metrology

HHG source, inspection apparatus and method for performing a measur...

Method and apparatus for determining the property of a structure, d...

Lithographic apparatus and method for performing a measurement

Method and apparatus for generating illuminating radiation

Patents Applicationslast 30 patents

METROLOGY MEASUREMENT METHOD AND APPARATUS

ASSEMBLY FOR SEPARATING RADIATION IN THE FAR FIELD

METHOD FOR CORRECTING MEASUREMENTS IN THE MANUFACTURE OF INTEGRATED...

REFLECTOR MANUFACTURING METHOD AND ASSOCIATED REFLECTOR

Method and Apparatus for Determining a Radiation Beam Intensity Pro...

Apparatus For Delivering Gas and Illumination Source for Generating...

METHOD AND APPARATUS FOR INSPECTION AND METROLOGY

Metrology Apparatus for and a Method of Determining a Characteristi...

HHG Source, Inspection Apparatus and Method for Performing a Measur...

Optical Detector

DETERMINING AN EDGE ROUGHNESS PARAMETER OF A PERIODIC STRUCTURE

Illumination Source for an Inspection Apparatus, Inspection Apparat...

Apparatus For Delivering Gas and Illumination Source for Generating...

Methods and Apparatus for Predicting Performance of a Measurement M...

Methods of Aligning a Diffractive Optical System and Diffracting Be...

METHODS AND APPARATUS FOR PREDICTING PERFORMANCE OF A MEASUREMENT M...

METHOD AND APPARATUS FOR INSPECTION AND METROLOGY

Illumination Source for an Inspection Apparatus, Inspection Apparat...

Illumination Source for an Inspection Apparatus, Inspection Apparat...

Illumination Source for an Inspection Apparatus, Inspection Apparat...

Method and Apparatus for Generating Illuminating Radiation

HHG Source, Inspection Apparatus and Method for Performing a Measur...

Method and Apparatus for Determining the Property of a Structure, D...

Lithographic Apparatus and Method for Performing a Measurement