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Sander C. Broers
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
High positioning reproducible low torque mirror-actuator interface
Patent number
8,256,912
Issue date
Sep 4, 2012
Carl Zeiss SMT GmbH
Herman M. J. R. Soemers
G02 - OPTICS
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Patent Grant
High positioning reproducible low torque mirror-actuator interface
Patent number
7,699,480
Issue date
Apr 20, 2010
Carl Zeiss SMT AG
Herman Soemers
G02 - OPTICS
Information
Patent Grant
High positioning reproducible low torque mirror-actuator interface
Patent number
7,604,359
Issue date
Oct 20, 2009
Carl Zeiss SMT AG
Herman Soemers
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
HIGH POSITIONING REPRODUCIBLE LOW TORQUE MIRROR - ACTUATOR INTERFACE
Publication number
20110176234
Publication date
Jul 21, 2011
Carl Zeiss SMT GMBH
Herman Soemers
G02 - OPTICS
Information
Patent Application
HIGH POSITIONING REPRODUCIBLE LOW TORQUE MIRROR - ACTUATOR INTERFACE
Publication number
20100149671
Publication date
Jun 17, 2010
Carl Zeiss SMT AG
Herman M.J.R. Soemers
G02 - OPTICS
Information
Patent Application
Hermetically sealed elements of an actuator
Publication number
20050099069
Publication date
May 12, 2005
Lucas Franciscus Koorneef
G02 - OPTICS